EURIS announces launch of new Arradiance GEMStar Quantum ALD System in Europe

Euris is proud to announce the launch of the GEMStar Quantum^TM, the latest generation of Atomic Layer Deposition system targeted for demanding applications requiring more precise control. Maintaining Arradiance’s belief of keeping footprint to a minimum, Quantum^TM is a fully capable Plasma assisted ALD system requiring less than 0,6m² of precious lab space.

Leveraging all of the reliability and proven performance of its predecessor, Quantum^TM provides the next level of process control for nanotechnologies.  Let’s briefly hit a few of the highlights of the system that rolls out of the crate, and is ready to go to work for you within a day:

300^oC hot wall dual zone air-cooled reactor

The Door configuration is ideal for Glove Box integrations and accepts all of the XT^TM series Door configurations.  The configuration shown is the rotation particle coating and particle cup option

New and improved Glove Box Interface

300W ICP Plasma Source with 4 MFC controlled inputs and automated safety valves

Onboard RF Auto-Match and plasma controller

On-board gas box supporting dual 200 ^oC manifolds completely separate metal/organics from the oxidizer/reducers until they reach the reactor

Eight material inputs supporting 5 on-board material ports, up to four moveable heater zones and 2 MFC controlled bulk gas inputs all supported by a MFC controlled carrier gas

In addition, one port has the newly released e-Pulse Vapor Push that is now MFC controlled

KF40 metrology interfaces

KF50 Exhaust port providing excellent vacuum conductance

EMO and external communication connections

The system is completely air-cooled – no chill water required!

The software and GUI has been completely refreshed to be easier to learn and operated with tons of built in safety features that works seamlessly with the embedded hardware safety capabilities